| Wavelength range | 139–800 nm, wavelength range measurable C, S, P, N |
| Detectable Matrix | Fe, Al, Cu, Zn matrix detection |
| Optical Structure | Type P-Longrange round full spectrum vacuum/non-vacuum optical system |
| Prober | 7–16 Block CCD, containing a measurement deep ultraviolet CCD |
| Gigantism Focal Length | HORIBA Jobin Y Concave Holographic Grating (2400 g/mm) |
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